Hexamethyldisilazane is used as a solvent in organic synthesis and organometallic chemistry. It is often used as an adhesion promoter for photoresist in photolithography. Further, it is used for the preparation of trimethylsilyl ethers from hydroxy compounds. It is used as an alternative to critical point drying during sample preparation in electron microscopy. It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.

Highly flammable. Moisture sensitive.

MDL:            MFCD00008259

EINECS:        213-668-5

Chemical Properties:

IUPAC name:                   1,1,1,3,3,3-Hexamethyldisilazane

Synonyms:                       HMDS, Bis(trimethylsilyl)amine

Formula:                           C6H19NSi2     [(CH3)3Si]2NH

CAS Number:                   999-97-3

Appearance:                    Colorless Liquid

Color Test:                         ≤ 10 APHA

Odor:                                  Ammonia-like

Purity (GC):                        ≥ 99.0%

Formula Weight:              161.40

Density:                             0.774 gm/cm3

Melting point:                   -78° C

Boiling Point:                     126° C

Flash Point:                        8°C (46°F)

Refractive Index:               1.4055-1.4095 @ 20°C

Infrared Spectrum:           Conforms to Structure

Storage & Sensitivity:          Moisture Sensitive. Store under Nitrogen. Ambient temperatures.

Solubility:                              Miscible with methanol, chloroform, ethyl ether and benzene. Immiscible with water.  

Incompatibility:                     Incompatible with strong oxidizing agents and strong acids.   

Shelf Life:                              3 years if stored, unopened under recommended conditions.

Hazardous For Shipping:    UN3286, CL 3(6.1, 8), PG II, Flammable Liquid, Toxic, Corrosive N.O.S.